Libra UV

Overview

Libra UV is a UV global shutter CMOS camera developed by Tucsen, designed for high-speed and high-resolution semiconductor inspection. It has been successfully integrated into various semiconductor manufacturing and defect inspection processes, including non-patterned wafer inspection, patterned wafer inspection, mask alignment, and wafer bonding.

Beyond semiconductor applications, Libra UV’s broad spectral range and exceptional UV response make it highly suitable for other industries. It holds significant potential in biological spectral analysis instrument integration, as well as medical and electronic product inspection, demonstrating its versatility across multiple fields.

Wide Spectrum/UV Enhancement

Libra UV leverages Sony’s IMX487 back-illuminated CMOS technology, offering a broad spectral range from 200 nm to 1000 nm. It delivers exceptional sensitivity in the ultraviolet (UV) band, particularly between 200-400 nm, with a quantum efficiency reaching 48% at 365 nm, ensuring superior UV response.

Global Shutter High-Speed Imaging

With global shutter technology, Libra UV captures fast-moving subjects with clarity. It features a high-speed 10G GigE interface, enabling frame rates of up to 100 fps at 12-bit and 152 fps at 8-bit at its full 8.1-megapixel resolution, providing outstanding performance for high-speed imaging applications.

Compact Structural Design

Designed for seamless integration into detection equipment and instrument systems, Libra UV maintains a compact form while delivering high-quality imaging performance. Its space-efficient design ensures compatibility with various applications where size and efficiency are critical.